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Solar Awards Thin Film Innovation Award Final DR 2/9/09 15:38 Page 26
SOLAR AWARDS
electron beam surface techniques. Thus The Auto SE covers the diversity of thin controlled cell, liquid cell, 360° rotation
contamination in the first 5-10 nm can be film applications, in the fields of thin film control, autosampler, plastic film mount,
easily observed which would otherwise be photovoltaics, micro-electronics, flat panel etc…) to accommodate a wide range of
obscured in more typical surface displays, functional and optical coatings experiments and sample shapes.
techniques. In addition, the multi-element and biotechnology.
detection capability permits a much faster The Auto SE is controlled by the Auto Soft
(and more cost effective) analysis to take The Auto SE is an integrated compact software integrated into the common
place. Multiple elements can be analyzed system that guarantees efficiency and software platform that controls all HORIBA
in both a depth profiling mode productivity for routine analysis of thin Jobin Yvon ellipsometers. Auto Soft
simultaneously with trace elements while films. Its design combines automation integrates very intuitive interfaces allowing
Issue IV 2009
looking for contamination. with experimental modularity. The full automatic analysis of thin film samples
instrument includes a 200x200 mm with simple push button operation.
The analysis for contamination is sample stage motorized in the XYZ axes Sample analysis takes only a few seconds
extremely useful as thin films and for automatic loading and alignment of and provides a complete report of film
efficiencies are still being developed and the sample. XY horizontal translation thicknesses, optical constants, surface
improved, and contamination is a specific allows mapping of thin film uniformity over roughness, and film inhomogeneities.
effect that can cause a drop in the sample area. Each point on the wafer
-pv-management.com photovoltaic yield. An extension of map is measured in less than 1 second, As the software is Multilanguage it is
contamination analysis in thin films is with full spectral information available simple to operate for everyone. The
.solar
looking at potential sources of over the range 440 – 850nm. software was created to fit the needs of
www
contamination such as sputter targets (an three types of users:
indium target for CIGS film for example). ring6 OPERATOR using a simple interface
26
GD-OES can analyze any type of surface for routine thin film control
material, typic al thin film, conductive or ring6 ENGINEER with a large variety of
even non-conductive materials, and this analysis functions to optimize results
sample flexibility allows additional and/or experimental recipes
avenues to find contamination sources. ring6 SERVICE with an interface for
Fuhe has taken an analytical tool that has detection and diagnosis of possible
typically been used for academia or problems of the system; thanks to
stainless steel analysis applications, and built-in diagnosic indicators including
extended it to thin film analysis for in Auto SE.
photovoltaic applications. A new The Auto SE features real-time
technique helps PV process engineers, visualization of the measurement site and The Auto SE is a new generation of thin
quality control and yield enhancement automated selection of 8 spot sizes. This film measurement tool that combines
engineers improve problem solving is very useful for cases where the sample ease-of-use with the accuracy of
and ultimately yield in photovoltaic is patterned or has poor surface quality. In spectroscopic ellipsometry. The Auto SE
processes. these cases the user may view exactly is a turnkey system that is ideal for the
where the sample spot is located using quality control laboratory and for
the Vision System, and choose the industrial lines that need routine thin film
optimum spot size accordingly. measurement.
The patented MyAutoView Vision System
is mounted within the standard
HORIBA Jobin Yvon ellipsometer optics. This unique design
The Auto SE provides two main advantages:
Isopad
Isopad Big Heating Plates
The Auto SE is an innovative thin film ring6 Visualization of the measurement site
measurement tool for determining the for all kinds of sample Isopad’s heating panels offer equipment
thicknesses and optical constants (n,k) of ring6 Selection and measurement of only manufacturers of thin film photovoltaic
thin layers and multi layers. The the front reflection for transparent cells the chance to make significantly
instrument has been introduced by substrates larger cells and lower the cost per watt of
HORIBA Jobin Yvon to simplify thin film energy generated. With decades of work
analysis whilst maintaining the major The image provided has a field of view of in the high vacuum industry, Isopad has
advantages of ellipsometry such as non- approximately 1mm2 and a resolution of developed some of the largest ‘all metal’
destructive analysis, accurate thickness 10 µm. panels available for high temperature,
measurement with angström resolution, The Auto SE also offers a large choice of PECVD and other deposition &
and multi-layer measurement capability. accessories (such as temperature subsequent lamination processes.
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